Multi-layer graphene pirani pressure sensors

Abstract The operating principle of Pirani pressure sensors is based on the dependence a suspended strip’s electrical conductivity, caused by thermal conductance surrounding gas which changes Joule heating strip. To realize such sensors, not only materials with high temperature dependent conductivity are required, but also minimization strip dimensions essential to maximize responsivity and minimize power consumption. Due this, nanomaterials especially attractive for this application. Here, we demonstrate use multi-layer graphene as sensor compare its behavior existing models. A clear resistance observed, maximum relative change 2.75% between 1 1000 mbar consumption 8.5 mW. enables miniaturization device footprint 100 times compared state-of-the-art. Moreover, allows lower and/or higher sensor’s nanogap operation near atmospheric that can be used in applications barometers altitude measurement. Furthermore, response depends type molecules, opens up way selective sensing applications. Finally, synthesis technology compatible wafer-scale fabrication, potentially enabling future chip-level integration readout electronics.